SpecEl Ellipsometer System
 The SpecEl-2000-VIS Ellipsometer measures polarized light reflected from the surface of a substrate to determine the thickness and refractive index of the material as a function of wavelength. The SpecEl is controlled via a PC. Measure refractive index, absorbance and thickness with the touch of a button.
All-in-one Accurate System
The SpecEl houses an integrated light source, a spectrometer and two polarizers fixed to 70°. It also includes a PC with a 32-bit Windows operating system. The SpecEl can detect a single layer as thin as 0.1 nm and up to 5 µm thick. In addition, it can provide refractive indices to 0.005°.
SpecEl Software and "Recipe" Files
In SpecEl Software, you can configure and save experiment method files for one-step analysis. after creating a "recipe," you can select the recipe to execute the experiment.
This screen shot from the SpecEl Software demonstrates the Psi and Delta values you can calculate for thickness, refractive index and absorbance.
Specifications
| Wavelength range: |
380-780 nm (standard) or 450-900 nm (optional) |
| Optical resolution: |
4.0 nm FWHM |
| Accuracy: |
0.1 nm thickness; 0.005% refractive index |
| Angle of incidence: |
70° |
| Film thickness: |
1-5000 nm for single transparent film |
| Spot size: |
2 mm x 4 mm (standard) or 200 µm x 400 µm (optional) |
| Sampling time: |
3-15 seconds (minimum) |
| Kinetic logging: |
3 seconds |
| Mechanical tolerance (height): |
+/- 1.5 mm, angle +/- 1.0° |
| Number of layers: |
Up to 32 layers |
| Reference: |
Not applicable | |
